MEMS Oscillating Squeeze-film Pressure Sensor with Optoelectronic Feedback
By:
Published on 2015 by
Abstract: This work reports on an oscillating pressure sensor that converts pressure into frequency using the squeeze-film effect. A new aspect is the laser Doppler vibrometer (LDV) in the optoelectronic feedback loop that is used to bring the sensor element into sustained mechanical oscillation. A phase shifter and automatic gain control circuit stabilize the oscillation. The frequency stability of the pressure sensor is investigated by measuring its Allan deviation and is compared to the performance of a quartz oscillating pressure sensor. Finally, the pressure resolution of this oscillating sensor is compared to conventional pressure sensors.
This Book was ranked at 21 by Google Books for keyword oscillating.
Book ID of MEMS Oscillating Squeeze-film Pressure Sensor with Optoelectronic Feedback's Books is iFcKvgEACAAJ, Book which was written by have ETAG "P+MU83XQlBA"
Book which was published by since 2015 have ISBNs, ISBN 13 Code is and ISBN 10 Code is
Reading Mode in Text Status is false and Reading Mode in Image Status is false
Book which have " Pages" is Printed at BOOK under Category
This Book was rated by Raters and have average rate at ""
This eBook Maturity (Adult Book) status is NOT_MATURE
Book was written in en
eBook Version Availability Status at PDF is falseand in ePub is false
Book Preview
0 komentar:
Posting Komentar